Precision assembly and metrology of x-ray foil optics

C.R. Forest, M.J. Spenko, Y. Sun, M. McGuirk, A.H. Slocum, and M.L. Schattenburg, Precision assembly and metrology of x-ray foil optics, Proceedings of the 17th Annual Meeting of the American Society of Precision Engineering, p. 244-249, St. Louis, MO, October 20-25, 2002.