LIGA gold mask metrology
C.R. Forest, C.C. Henderson, B.E. Mills, and T.R. Kurfess, LIGA gold mask metrology, Sandia National Laboratories, Microsystems Processing Division, US Department of Energy, Livermore, CA, July 26, 2001.
C.R. Forest, C.C. Henderson, B.E. Mills, and T.R. Kurfess, LIGA gold mask metrology, Sandia National Laboratories, Microsystems Processing Division, US Department of Energy, Livermore, CA, July 26, 2001.