Thin glass optic and silicon wafer deformation and kinematic constraint

C. Forest, M. Akilian, G. Vincent, A. Lamure and M.L. Schattenburg, Thin glass optic and silicon wafer deformation and kinematic constraint, Proceedings of the 18th Annual Meeting of the American Society of Precision Engineering, V. 30, p. 39-42, Portland, OR, October 26-31, 2003.