Static and Dynamic Optical Metrology of Micro-Mirror Thermal Deformation

March 11, 2004

C.R. Forest, P. Reynolds-Browne, O. Blum-Spahn, J. Harris, E. Novak, C.C. Wong, S. Mani, F. Peter, and D. Adams, Static and Dynamic Optical Metrology of Micro-Mirror Thermal Deformation, Proceedings of the 2004 Nanotechnology Conference and Trade Show, V. 2, p. 363-366,Boston, MA, March 7-11, 2004.