Quantifying Laser-Induced Thermal Deformation of a MEMS Device
M. Zecchino and C.R. Forest, Quantifying Laser-Induced Thermal Deformation of a MEMS Device, Semiconductor Manufacturing Magazine, Vol. 5(8), p. 52-56, Aug 2004.
M. Zecchino and C.R. Forest, Quantifying Laser-Induced Thermal Deformation of a MEMS Device, Semiconductor Manufacturing Magazine, Vol. 5(8), p. 52-56, Aug 2004.