Precision microcomb design and fabrication for x-ray optics assembly

Y. Sun, R.K. Heilmann, C.G. Chen, C.R. Forest and M.L. Schattenburg, Precision microcomb design and fabrication for x-ray optics assembly, Journal of Vacuum Science and Technology B, Vol. 21(6), p. 2970-2974, November/December 2003.