Measurement of Transient Thermal Response of Micro-Mirrors

C.R. Forest, P. Reynolds-Browne, O. Blum-Spahn, J. Harris, E. Novak, C.C. Wong, S. Mani, F. Peter, and D. Adams, Measurement of Transient Thermal Response of Micro-Mirrors, Proceedings of Hilton Head 2004: A Solid State Sensor, Actuator and Microsystems Workshop, p. 386-391, Hilton Head Island, SC, June 6-10, 2004.